- Featured Filtration
Entegris CMP Filtration 9522
The Solaris CL design provides the lower CoO solution for POU CMP slurry filtration with very good particle removal efficiency over flux ration. There are many routes to reduce cost of ownership; by improving yield, lowering labor cost, lowering consumable cost or extending consumable usable lifetime. In this paper we focused on achieving lower CoO by extending consumable usable life without sacrificing CMP yield.