Axus Technology

High Purity/AXUS Technology

Axus Technology

Axus Technology is the industry expert in providing material processing and CMP foundry services, process tools, and custom configured upgrades that are designed to meet your process and production requirements. We deliver leading-edge CMP, wafer thinning and wafer polishing solutions for semiconductor, MEMS/Nanofabrication, nanofabrication and substrate applications. 

Customer support services include tool upgrades, robot repair , spare parts, and field service support for a range of CMP and wafer grinding tools, including installed legacy tools. Engineering services include process development, equipment modification and upgrade, and the value engineering of critical components.  Axus also manages surplus equipment transactions and the remarketing of excess spares and materials.

Overview of Products

  • CMP Equipment
  • CMP Foundry Services
  • Wafer Grinding Equipment
  • Wafer/Substrate Cleaning Equipment
  • G & P Technology Equipment
  • Slurry Delivery Systems
  • Custom Equipment Design
  • Equipment Rental Services
  • In-House Process Services
  • Spare / Refurbished Parts
  • Robot Repairs
  • Carrier Upgrades

Axus Technology GP450U CMP Tool

The Axus Technology GP450U CMP tools is based on the proven platform pioneered by G&P Technology.  Built by Axus Technology in Chandler, AZ, the GP450U is designed to provide flexible CMP process capability for applications where ease of use, reliability, and a compact design are essential. Capable of working with substrates with diameters up to 150mm diameter, the GP450U offers configuration choices in carrier type, conditioner technology, pad profiling, and process measurement and monitoring systems. The GP450U utilizes an intuitive touch-screen user interface and a robust PLC control system that includes the multiple process steps and detailed process controls that users expect. Reliability and flexibility is further enhanced by relying on manual single substrate loading. The Axus Technology GP450U delivers high value performance and research capability in a package that is compact and economical.


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