Cyberoptics Metrology Wafers

Speed your semiconductor processes with WaferSense and ReticleSense measurement devices.

When you need the most efficient and effective measurement devices for semiconductor tool set-up and maintenance processes, count on CyberOptics, the global market leader in wireless semiconductor measurement devices for chamber gapping, leveling, wafer handoff teaching, vibration, airborne particle, relative humidity and resistance measurement.

Semiconductor fabs and OEMs value the accuracy, precision and versatility of the WaferSense and ReticleSense measurement portfolio to enable improvements in fab yields and equipment uptime.

Overview of Products

  • AMS – WaferSense Auto Multi Sensor
  • AVLS3 – WaferSense Auto Vibration & Leveling Sensor
  • ALSV2 – WaferSense Auto Leveling System 2 – Vertical
  • AGS – WaferSense Auto Gapping System
  • AVS – Wafersense Auto Vibration System
  • ATS – WaferSense Auto Teaching System (The Camera Wafer)
  • AMSR – RedicleSense Auto Multi Sensor
  • APS 1, 2 & 3 – WaferSense Airborne Particle Sensor
  • IPS – In-Line Particle Sensor

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