CMP Filtration Solutions


CMP Filtration Solutions

Overview of Products:

Planargard® NMB Filter

Best-in-class, bulk slurry filter with ultra-high particle loading capacity for bulk processes in sub 45 nm technology nodes. Enables superior hard particle removal and gel retention performance to prevent micro scratches.

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Planargard® CL Filter

Bulk CMP slurry filter for 65 nm or greater technology nodes to prevent micro-scratches

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Planarcap® TPX Filter

Point-of-dispense CMP slurry filter to prevent micro-scratches

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Planarcap KPX Filter

Point-of-dispense filter designed to handle low-concentration, small abrasive and ceria-based slurries in 65 nm or greater technology nodes to prevent micro-scratches. Enables good flow rate performance and increased filter lifetime.

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