Entegris Flow Controllers

Overview of Products

  • InVue Flow Controllers
  • NT Flow Controllers

InVue® Integrated Flow Controllers, Model NT6510

InVue® Integrated Flow Controllers offer precise point-of-use chemical flow control. The Integrated Flow Controller NT6510 is designed for point-of-use blending and dispense applications requiring low to medium flow rates (15 – 1250 mL/min).

  • Most accurate in bubble prone media vs. other commonly used technologies
  • Integral pressure transducer for simultaneous dual output – flow and pressure
  • Compact footprint for space savings and easy installation
  • High repeatability for superior process control
  • Fast response for accurate dispense rates
  • LED status and discrete alarm output

InVue® Integrated Flow Controllers, Model NT6520

InVue® Integrated Flow Controllers offer precise point-of-use chemical flow control. The Integrated Flow Controller NT6520 is designed for point-of-use blending and dispense applications requiring medium to high flow rates (2.5 – 40 L/min).

  • Most accurate in bubble prone media vs. other commonly used technologies
  • Integral pressure transducer for simultaneous dual output – flow and pressure
  • Compact footprint for space savings and easy installation
  • High repeatability for superior process control

NT™ Integrated Flow Controllers, Model 6500

The patented NT™ Integrated Flow Controller, Model 6500 is a leading-edge liquid flow controller that allows for greater control of your process flow variables in legacy applications.

  • PTFE wetted surfaces for high purity applications
  • Nonmetallic components offer corrosion resistance
  • Integral pressure transducer provides additional process information
  • Yields one percent (1%) full scale accuracy in critical dispense applications
  • The compact footprint offers easy field installations where space is limited
  • Gives fast response for accurate dispense rates

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