From the smallest spare part through to the complete ion source. For all wafer diameters and production technologies: With more than 2000 components for implanter systems, we are the world’s largest second source supplier for ion implantation.
This process for the manufacture of semiconductors takes place at high temperatures and in the presence of aggressive process gases and strong electromagnetic fields. For our components made of molybdenum, tungsten, graphite, ceramics and steel that’s not a problem. These ensure that the electrons are generated at temperatures of up to 1 400 °C and then channeled precisely along the beam path.
Overview of Products
Chambers (graphite, tungsten, molybdenum and alloys)
Filaments (tungsten and tungsten alloys)
Arc slits (graphite, tungsten, molybdenum and alloys)
Holders (tungsten, molybdenum and alloys)
Cathodes (tungsten, molybdenum and alloys)
End station (graphite)
Analyzer components (graphite)
Spare parts (graphite, tungsten, molybdenum and alloys, ceramics, steel)
Overview of qualified OEM's
Applied Materials: 9000, 9200, 9200xR, 9500, 9500xR, Quantum, Quantum I, Quantum II, Quantum III, Quantum X, Quantum X+, Quantum xR, xR, xR/Leap, xR120, xR200, xR80