![](https://www.semitorrinc.com/wp-content/uploads/2023/08/cmp-pad-1-300x154.jpg)
Entegris Planargem CMP Pad Conditioners
Micro-machined SiC substrate with conformal CVD diamond coating delivers long-life, highly uniform pad conditioning while minimizing substrate damage. Planargem® CMP Pad Conditioners offer leading-edge, customer-tailored performance across all aspects of the CMP Process.