Entegris Planargem CMP Pad Conditioners

High Purity/CMP Components/Entegris Planargem CMP Pad Conditioners

Micro-machined SiC substrate with conformal CVD diamond coating delivers long-life, highly uniform pad conditioning while minimizing substrate damage. PlanargemĀ® CMP Pad Conditioners offer leading-edge, customer-tailored performance across all aspects of the CMP Process.

Overview of Products

  • Tunable coating roughness provides alignment with customer performance requirements
  • CVD diamond coating eliminates defects caused by lost or broken diamonds
  • Tunable SiC features offer performance flexibility to match customer process
  • Micro-machined silicon carbide carrier offers superior feature consistency with conditioner life and uniformity improvement

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