Micro-machined SiC substrate with conformal CVD diamond coating delivers long-life, highly uniform pad conditioning while minimizing substrate damage. Planargem® CMP Pad Conditioners offer leading-edge, customer-tailored performance across all aspects of the CMP Process.
Overview of Products
Tunable coating roughness provides alignment with customer performance requirements
CVD diamond coating eliminates defects caused by lost or broken diamonds
Tunable SiC features offer performance flexibility to match customer process
Micro-machined silicon carbide carrier offers superior feature consistency with conditioner life and uniformity improvement