Entegris Planarcore CMP Brushes

Planarcore® PVA Brushes are designed to deliver superior performance and wafer-to-wafer uniformity in post CMP wafer cleaning applications. The unique molded-through-the-core technology provides absolute adhesion of the PVA to the brush core, unlike standard PVA products that are merely friction-fitted to the core.


  • High-Purity PVA
  • Molded through the core construction
  • Eliminates alignment and gapping problems, increasing system throughput
  • Close molded technology
  • Reduces downtime on tool
  • Decreases defectivity on wafer

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Entegris Planacore CMP Brushes