Planarcore® PVA Brushes are designed to deliver superior performance and wafer-to-wafer uniformity in post CMP wafer cleaning applications. The unique molded-through-the-core technology provides absolute adhesion of the PVA to the brush core, unlike standard PVA products that are merely friction-fitted to the core.
OVERVIEW OF PRODUCTS
- High-Purity PVA
- Molded through the core construction
- Eliminates alignment and gapping problems, increasing system throughput
- Close molded technology
- Reduces downtime on tool
- Decreases defectivity on wafer