Wafergard 1.5” W-Seal Gas Filter

Wafergard 1.5″ W-Seal Mini, corrosion-resistant filters provide the industry’s best gas filter for ultrapure surface-mount applications

Wafergard SG Gas Filters

Wafergard® SG FG Gas filters provide superior particulate filtration to maximize photovoltaic cell and display manufacturing production yields. The PTFE filter elements are compatible with high-purity process gases as well as inert gas and CDA applications.

Linegard Micro In-Line Gas Filters

Linegard™ Micro In-line Gas Filter is a compact in-line gas filter made of 100 percent SUS316L. This economical filter is a safeguard against contamination which may have an adverse effect on critical components.

Unigard In-Line Gas Filters

The Unigard™ filter is an all-in-one filter designed to fit in place of standard 1/4″ gasket seal fittings in the gas distribution line.

Wafergard GN Gas Filter Gun

This easy-to-use, lightweight gas filter gun is designed for POU filtration of compressed gas in semiconductor applications.

Wafergard II Micro In-Line Gas Filters

Superior particulate filtration for ultrapure gas system filtration. Recommended for inert and reactive gases, the Wafergard® II F Micro In-Line Gas Filters offer excellent compatibility with all classes of semiconductor process gases.

Wafergard III NF-30 Gas Filters

Wafergard III nickel filters are the cleanest, most efficient all-metal filters available. The patented nickel filter membrane offers superior corrosion resistance and excellent compatibility with inert and reactive gases.

Wafergard C-Seal Gas Filter

Wafergard C-Seal all-metal gas filters dramatically reduce footprint and provide ultrapure filtration in a surface-mount design.

Wafergard II F Mini XL Gas Filters

Superior particulate filtration for ultrapure gas systems. Wafergard® II F Mini XL Gas Filters deliver excellent compatibility with all classes of semiconductor process gases.

Wafergard II SF 3XP Mini In-Line Gas Filters

Wafergard® II SF 3XP Mini in-line gas filters for ultra-high purity (UHP), high-flow gas lines are all 316L stainless steel contractions and are designed with 3x higher flow rate than 3-digit higher retention efficiency than similar filters. Designed for mid-range flow rates up to 500 SLPM and recommended filtration of UHP high-flow applications such as diffusion, annealing, epitaxy tools and connections.

Wafergard MAX In-Line PTFE Gas Filters

These in-line PTFE gas filters are compatible with high-purity gases and provide superior particulate filtration in ultrapure gas applications as well as general nitrogen and CDA applications.

Wafergard II SF Half In-Line Gas Filters

Wafergard® II SF Half In-line gas filters are the filters of choice for high-purity gas systems when all stainless steel constructions is preferred. A state-of-the-art housing assembly eliminated outgassing by minimizing weld area. The all-metal construction is ideal for high-temperature and dynamic pressure applications. Its compact size and flexible choice of fittings provide ultimate design efficiency and minimize engineering costs.

Wafergard II SF Micro XL In-Line Gas Filters

Wafergard® II SF Micro XL in-line gas filters are the filters of choice for high-purity gas systems when all stainless steel constructions are preferred.

Wafergard III NF-75 In-Line Gas Filters

Wafergard III nickel filters are the cleanest, most efficient all-metal filters available, with patented nickel filter membranes, they offer superior corrosion resistance and excellent compatibility with inert and reactive gases.

Wafergard MAX-1000 In-Line PTFE Gas Filter

Wafergard® MAX-1000 In-line PTFE gas filters offer superior particulate filtration for ultrapure gas applications.

Wafergard II SF Mini In-Line Gas Filters

Wafergard® II SF Mini and Mini XL In-line gas filters are the filters of choice for high-purity gas systems when all stainless steel constructions are preferred.

Wafergard III NF Mini In-Line Gas Filters

The cleanest, most efficient all-metal nickel filters available for ultrapure gas system filtration, available in Mini and Mini XL formats.

Wafergard II SF 3XP Mini XL Gas Filters

Wafergard® II SF 3XP Mini XL in-line gas filters for ultra-high purity (UHP), high-flow gas lines are all 316L stainless steel contractions and are designed with 3x higher flow rate than 3-digit higher retention efficiency than similar filters. Designed for mid-range flow rates up to 500 SLPM and recommended filtration of UHP high-flow applications such as diffusion, annealing, epitaxy tools, and connections.

Wafergard 1.125” W-Seal Gas Filter

With a 1.125″ square base, these SurfaceLine® filters provide the industry’s smallest surface-mount gas filter.

Wafergard III Bulk In-Line Metal Gas Filters

Entegris’ complete line of all-metal high-flow filtration products satisfies the concerns and needs to supply particle-free process gas at the point of delivery. This is the solution for high-flow, high-purity gas filtration.

Wafergard GTL In-Line Gas Filters

Wafergard® GTL in-line gas filters are designed to remove particles from inert gases for flow rates up to 60 slpm.

Wafergard III NF Micro XL In-Line Gas Filters

Wafergard® III NF Micro XL nickel filters, the cleanest and most efficient filters available

• State-of-the-art housing assembly eliminates outgassing by minimizing weld area
• All-metal construction is ideal for high-temperature and dynamic-pressure applications
• Compact size and flexible choice of fittings provide ultimate design efficiency and minimize engineering costs

Wafergard GT Plus In-Line Gas Filters

Wafergard® GT-PLUS in-line gas filters remove particles from inert gases for flow rates up to 30 slpm.

Wafergard III NF-100 In-Line Gas Filters

The all-metal filter offers superior corrosion resistance and excellent compatibility in inert and reactive gas applications with flows up to 100 slpm.

Linegard MAX-FP Gas Filters

Linegard™ MAX-FP in-line Teflon® gas filters with a particle removal rating of 0.003 µm are designed as a cost-effective solution for mid-flow range on noncritical applications.

Wafergard MAX HT In-Line Gas Filters

Provides superior particulate filtration in high-temperature applications (up to 200°C)

Gasketgard In-Line Gasket Filters

The Gasketgard® In-line Gasket filter is a compact, all-metal filter that fits in place of standard 1/4″, 3/8″ and 1/2″ VCR® gaskets.

Wafergard IV HF Mini In-Line Gas Filters

The alloy-22 membrane offers the most inert and reactive gas compatibility in our Wafergard® product line.

Linegard GIGAX-FP Filters

A cost-effective compressed air and inert gas filter for high-flow range on noncritical applications.

• Cost-effective PTFE membrane for filtering compressed air and inert gases
• Can be used up to 3000 SLPM for high-flow applications

Wafergard II F-1500 In-Line Gas Filters

These filters have excellent compatibility with all classes of semiconductor gases and offer high-efficiency particulate filtration.