Entegris Gas Filters

Nickel, Stainless Steel and Teflon® Filter Technologies

Entegris ultrapure gas filtration products offer 0.003 micron particle filtration for ultrapure gas applications. Wafergard® gas filters enable higher process gas throughput while reducing the overall gas box footprint.

 Wafergard III NF-750 In-Line Gas Filters

Wafergard III nickel filters are the cleanest, most efficient all-metal filters available, with patented nickel filter membrane, they offer superior corrosion resistance and excellent compatibility with inert and reactive gases.

Product Downloads

Wafergard 1.5” W-Seal Gas Filter

Wafergard 1.5″ W-Seal Mini, corrosion-resistant filters provide the industry’s best gas filter for ultrapure surface-mount applications

Product Downloads

Wafergard SG Gas Filters

Wafergard® SG FG Gas filters provide superior particulate filtration to maximize photovoltaic cell and display manufacturing production yields. The PTFE filter elements are compatible with high-purity process gases as well as inert gas and CDA applications.

Product Downloads

Linegard Micro In-Line Gas Filters

Linegard™ Micro In-line Gas Filter is a compact in-line gas filter made of 100 percent SUS316L. This economical filter is a safeguard against contamination which may have an adverse effect on critical components.

Product Downloads

Unigard In-Line Gas Filters

The Unigard™ filter is an all-in-one filter designed to fit in place of standard 1/4″ gasket seal fittings in the gas distribution line.

Product Downloads

Wafergard GN Gas Filter Gun

This easy-to-use, lightweight gas filter gun is designed for POU filtration of compressed gas in semiconductor applications.

Product Downloads

Wafergard II Micro In-Line Gas Filters

Superior particulate filtration for ultrapure gas system filtration. Recommended for inert and reactive gases, the Wafergard® II F Micro In-Line Gas Filters offer excellent compatibility with all classes of semiconductor process gases.

Product Downloads

Wafergard III NF-30 Gas Filters

Wafergard III nickel filters are the cleanest, most efficient all-metal filters available. The patented nickel filter membrane offers superior corrosion resistance and excellent compatibility with inert and reactive gases.

Product Downloads

Wafergard III NF Micro In-Line Gas Filters

Wafergard® III nickel filters are the cleanest, most efficient all-metal filters available. The patented nickel filter membrane offers superior corrosion resistance and excellent compatibility with inert and reactive gases.

Product Downloads

Wafergard C-Seal Gas Filter

Wafergard C-Seal all-metal gas filters dramatically reduce footprint and provide ultrapure filtration in a surface-mount design.

Product Downloads

Wafergard II F Mini XL Gas Filters

Superior particulate filtration for ultrapure gas systems. Wafergard® II F Mini XL Gas Filters deliver excellent compatibility with all classes of semiconductor process gases.

Product Downloads

Wafergard II SF 3XP Mini In-Line Gas Filters

Wafergard® II SF 3XP Mini in-line gas filters for ultra-high purity (UHP), high-flow gas lines are all 316L stainless steel contractions and are designed with 3x higher flow rate than 3-digit higher retention efficiency than similar filters. Designed for mid-range flow rates up to 500 SLPM and recommended filtration of UHP high-flow applications such as diffusion, annealing, epitaxy tools and connections.

Product Downloads

Wafergard MAX In-Line PTFE Gas Filters

These in-line PTFE gas filters are compatible with high-purity gases and provide superior particulate filtration in ultrapure gas applications as well as general nitrogen and CDA applications.

Product Downloads

Wafergard II SF Half In-Line Gas Filters

Wafergard® II SF Half In-line gas filters are the filters of choice for high purity gas systems when all stainless steel constructions is preferred. A state-of-the-art housing assembly eliminated outgassing by minimizing weld area. The all-metal construction is ideal for high temperature and dynamic pressure applications. Its compact size and flexible choice of fittings provides ultimate design efficiency and minimizes engineering costs.

Product Downloads

Wafergard II SF Micro XL In-Line Gas Filters

Wafergard® II SF Micro XL in-line gas filters are the filters of choice for high purity gas systems when all stainless steel constructions is preferred.

Product Downloads

Wafergard III NF-75 In-Line Gas Filters

Wafergard III nickel filters are the cleanest, most efficient all-metal filters available, with patented nickel filter membrane, they offer superior corrosion resistance and excellent compatibility with inert and reactive gases.

Product Downloads

Wafergard MAX-1000 In-Line PTFE Gas Filter

Wafergard® MAX-1000 In-line PTFE gas filters offer superior particulate filtration for ultrapure gas applications.

Product Downloads

Wafergard II SF Mini In-Line Gas Filters

Wafergard® II SF Mini and Mini XL In-line gas filters are the filters of choice for high purity gas systems when all stainless steel constructions is preferred.

Product Downloads

Wafergard III NF Mini In-Line Gas Filters

The cleanest, most efficient all-metal nickel filters available for ultrapure gas system filtration, available in Mini and Mini XL formats.

Product Downloads

Wafergard II SF 3XP Mini XL Gas Filters

Wafergard® II SF 3XP Mini XL in-line gas filters for ultra-high purity (UHP), high-flow gas lines are all 316L stainless steel contractions and are designed with 3x higher flow rate than 3-digit higher retention efficiency than similar filters. Designed for mid-range flow rates up to 500 SLPM and recommended filtration of UHP high-flow applications such as diffusion, annealing, epitaxy tools and connections.

Product Downloads

Wafergard 1.125” W-Seal Gas Filter

With a 1.125″ square base, these SurfaceLine® filters provide the industry’s smallest surface-mount gas filter.

Product Downloads

Wafergard III Bulk In-Line Metal Gas Filters

Entegris’ complete line of all-metal high-flow filtration products satisfies the concerns and needs to supply particle-free process gas at the point of delivery. This is the solution for high-flow, high-purity gas filtration.

Product Downloads

Wafergard GTL In-Line Gas Filters

Wafergard® GTL in-line gas filters are designed to remove particles from inert gases for flow rates up to 60 slpm.

Product Downloads

Wafergard III NF Micro XL In-Line Gas Filters

Wafergard® III NF Micro XL nickel filters, the cleanest and most efficient filters available

  • State-of-the-art housing assembly eliminates outgassing by minimizing weld area
  • All-metal construction is ideal for high-temperature and dynamic-pressure applications
  • Compact size and flexible choice of fittings provide ultimate design efficiency and minimize engineering costs

 

Product Downloads

Wafergard GT Plus In-Line Gas Filters

Wafergard® GT-PLUS in-line gas filters remove particle from inert gases for flow rates up to 30 slpm.

 

Product Downloads

Wafergard III NF-100 In-Line Gas Filters

The all-metal filter offers superior corrosion resistance and excellent compatibility in inert and reactive gas applications with flows up to 100 slpm.

 

Product Downloads

Linegard MAX-FP Gas Filters

Linegard™ MAX-FP in-line Teflon® gas filters with a particle removal rating of 0.003 µm are designed as a cost-effective solution for mid-flow range on noncritical applications.

 

Product Downloads

Wafergard MAX HT In-Line Gas Filters

Provides superior particulate filtration in high-temperature applications (up to 200°C)

 

Product Downloads

Gasketgard In-Line Gasket Filters

The Gasketgard® In-line Gasket filter is a compact, all-metal filter which fits in palce of standard 1/4″, 3/8″ and 1/2″ VCR® gaskets.

 

Product Downloads

Wafergard IV HF Mini In-Line Gas Filters

The alloy-22 membrane offers the most inert and reactive gas compatibility in our Wafergard® product line.

 

Product Downloads

Linegard GIGAX-FP Filters

A cost-effective compressed air and inert gas filter for high-flow range on noncritical applications.

  • Cost-effective PTFE membrane for filtering compressed air and inert gases
  • Can be used up-to 3000 SLPM for high-flow applications

 

Product Downloads

Wafergard II F-1500 In-Line Gas Filters

These filters have excellent compatibility with all classes of semiconductor gases and offer high-efficiency particulate filtration.

 

Product Downloads

Quick Contact

speech-icon

Have a question or can't find what you're looking for?

Please reach out to our experts to learn about the complete list of products we offer.

document-icon

Learn more about the manufacturers that we carry.

We carry a variety of products from the best manufacturers in the industry.

Learn about our locations

Not all products are offered in each location. Please contact a SemiTorr representative to understand the products offered in each SemiTorr territory.

Have a question?

Talk to our team at one of our locations across the country.