ICS - Integrated Circuit Support

High Purity/Second Source & Spare Parts/ICS – Integrated Circuit Support

ICS distributes high technology front-end wafer processing equipment replacement parts. These products include major components for line maintenance used in the fabrication of microelectronic devices.


Overview of Products

Critical Spare Parts for:

  • AMAT
  • LAM
  • CMP Tools
  • Novellus
  • Tegal
  • Semitool
  • Ulvac
  • TEL
  • Gasonics
  • Matrix

Quick Contact


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    Learn more about the manufacturers that we carry.

    We carry a variety of products from the best manufacturers in the industry.

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    Not all products are offered in each location. Please contact a SemiTorr representative to understand the products offered in each SemiTorr territory.

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