Entegris Gas Purifiers

OUR GPU GAS PURIFIERS EFFICIENTLY REMOVE HALOGENATED GASES, HYDRIDES, REACTIVE OXIDES, SATURATED AND UNSATURATED HYDROCARBONS, FLUOROCARBONS, AND CHLOROCARBONS AT A VARIETY OF FLOW RATES.
Entegris Gas Filters

Entegris ultrapure gas filtration products offer 0.003-micron particle filtration for ultrapure gas applications. Wafergard® gas filters enable higher process gas throughput while reducing the overall gas box footprint.
Haskel Pumps & Hydraulic Boosters

Haskel has a strong reputation for quality, safety, and reliability, unrivaled expertise in high-pressure, liquid, and gas transfer and pressurization technology, and the willingness to work closely with customers, drives us to continually meet complex and critical challenges with innovative solutions.
KF/NW Gaskets, Centering O-Rings, Customization

Our team of trained professionals is here to help at every step of the process. Please feel free to contact us through this form, give us a call, or reach out via email. You can expect a response within 24 hours.
Ham-Let Face Seal Gaskets

Ham-Let is an industry leader in high purity gas management. Products include high purity gaskets, fittings, valves and hoses.
Sanko Kogyo DISS Gaskets

DIIS cylinder gas connections
Entegris Dispense Pumps

Photochemical Dispense Systems and Network Communication Systems
Entegris CMP Filtration Solutions

Best-in-class, bulk slurry filter with ultra-high particle loading capacity for bulk processes in sub-45 nm technology nodes. Enables superior hard particle removal and gel retention performance to prevent micro scratches.
Entegris Planargem CMP Pad Conditioners

Micro-machined SiC substrate with conformal CVD diamond coating delivers long-life, highly uniform pad conditioning while minimizing substrate damage. Planargem® CMP Pad Conditioners offer leading-edge, customer-tailored performance across all aspects of the CMP Process.
Entegris Planarcore CMP Brushes

Planarcore® PVA Brushes are designed to deliver superior performance and wafer-to-wafer uniformity in post CMP wafer cleaning applications. The unique molded-through-the-core technology provides absolute adhesion of the PVA to the brush core, unlike standard PVA products that are merely friction fitted to the core.