OVERVIEW OF PRODUCTS
- Photochemical Dispense Systems
- Network Communication System
IntelliGen® MV Dispense Systems
A new platform two-stage system with built-in dual PT sensors enables independent dispense and filtration of medium-viscosity fluids
- Medium-viscosity fluid dispense with 100-300 cP or at higher viscosity when dispense pressure does not exceed 29 psig
- Reliable dispense of medium-viscosity fluid (100-300 cP) without sacrificing filtration performance
- New user-friendly MMI software simplifies recipe programming and provides real-time status
- Real-time robust confirmation tools help minimize costly wafer defects
Product Downloads
IntelliGen® MV Dispense System
IntelliGen® HV Dispense Systems
A two-stage system with built-in dual PT sensors enables independent dispense and filtration of high-viscosity fluids
- High-viscosity fluid dispense with 300-20,000 cP or at higher viscosity when dispense pressure does not exceed 250 psig
- Reliable dispense of high-viscosity fluid (300-20,000 cP) without sacrificing filtration performance
Product Downloads
IntelliGen® HV & Impact® HV Fluid Dispense System
IntelliGen® LV Dispense Systems
A new platform two-stage system with built-in dual PT sensors enables independent dispense and filtration of low-viscosity fluids
- Low viscosity photochemical dispense with 1 – 100 cP or at higher viscosities when dispense pressure does not exceed 29 psig
- Reliable dispense of low-viscosity fluid (1-100 cP) without sacrificing filtration performance
- New user-friendly MMI software simplifies recipe programming and provides real-time status
- Real-time robust confirmation tools help minimize costly wafer defects
Product Downloads
IntelliGen® LV Dispense System
IntelliGen® ULV Dispense Systems
A Leading-edge, two-stage system with built-in dual PT sensors not only enables independent dispensing and filtration but also achieves defect reduction of low-viscosity fluids.
- Low-viscosity fluid dispense with 1 – 100 cP or at higher viscosity when dispense pressure does not exceed 29 psig
- Reliable dispense of low-viscosity fluid (1-100 cP) without sacrificing filtration performance
- New user-friendly MMI software simplifies recipe programming and provides real-time status
- Real-time robust confirmation tools help minimize costly wafer defects
- Optimized fluid flow path provides better chemical turnover and reduced dead volume
- Improved dispense feature prevents motor backlash enabling more consistent dispense
- An optional post-cleaning procedure is available to help achieve faster start-up of wafer run
