IntelliGen® MV Dispense Systems

New platform two-stage system with built in dual PT sensors enables independent dispense and filtration of medium-viscosity fluids

• Medium-viscosity fluid dispense with 100-300 cP or at higher viscosity when dispense pressure does not exceed 29 psig
• Reliable dispense of medium-viscosity fluid (100-300 cP) without sacrificing filtration performance
• New user-friendly MMI software simplifies recipe programming and provides real time status
• Real-time robust confirmation tools help minimize costly wafer defects

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• IntelliGen® MV Dispense System

IntelliGen® HV Dispense Systems

Two-stage system with built in dual PT sensors enables independent dispense and filtration of high-viscosity fluids

• High-viscosity fluid dispense with 300-20,000 cP or at higher viscosity when dispense pressure does not exceed 250 psig
• Reliable dispense of high-viscosity fluid (300-20,000 cP) without sacrificing filtration performance

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• IntelliGen® HV & Impact® HV Fluid Dispense System

IntelliGen® LV Dispense Systems

New platform two-stage system with built in dual PT sensors enables independent dispense and filtration of low viscosity fluids

• Low viscosity photochemical dispense with 1 – 100 cP or at higher viscosities when dispense pressure does not exceed 29 psig
• Reliable dispense of low-viscosity fluid (1-100 cP) without sacrificing filtration performance
• New user-friendly MMI software simplifies recipe programming and provides real-time status 
• Real time robust confirmation tools help minimize costly wafer defects

Product Downloads

• IntelliGen® LV Dispense System

IntelliGen® ULV Dispense Systems

Leading-edge, two-stage system with built in dual PT sensors not only enables independent dispense and filtration, but also achieves defect reduction of low-viscosity fluids. 

• Low -viscosity fluid dispense with 1 – 100 cP or at higher viscosity when dispense pressure does not exceed 29 psig 
• Reliable dispense of low-viscosity fluid (1-100 cP) without sacrificing filtration performance
• New user-friendly MMI software simplifies recipe programming and provides real-time status
• Real time robust confirmation tools help minimize costly wafer defects
• Optimized fluid flow path provides better chemical turnover and reduced dead volume
• Improved dispense feature prevents motor backlash enabling more consistent dispense
• Optional post-cleaning procedure is available to help achieve faster start-up of wafer run

Product Downloads

• IntelliGen® ULV Dispense System