Entegris Dispense Pumps

High Purity/Fluid Handling Pumps/Entegris Dispense Pumps


Overview of Products

  • Photochemical Dispense Systems
  • Network Communication System

IntelliGen® MV Dispense Systems

New platform two-stage system with built in dual PT sensors enables independent dispense and filtration of medium-viscosity fluids

  • Medium-viscosity fluid dispense with 100-300 cP or at higher viscosity when dispense pressure does not exceed 29 psig
  • Reliable dispense of medium-viscosity fluid (100-300 cP) without sacrificing filtration performance
  • New user-friendly MMI software simplifies recipe programming and provides real time status
  • Real-time robust confirmation tools help minimize costly wafer defects

IntelliGen® HV Dispense Systems

Two-stage system with built in dual PT sensors enables independent dispense and filtration of high-viscosity fluids

  • High-viscosity fluid dispense with 300-20,000 cP or at higher viscosity when dispense pressure does not exceed 250 psig
  • Reliable dispense of high-viscosity fluid (300-20,000 cP) without sacrificing filtration performance

IntelliGen® LV Dispense Systems

New platform two-stage system with built in dual PT sensors enables independent dispense and filtration of low viscosity fluids

  • Low viscosity photochemical dispense with 1 – 100 cP or at higher viscosities when dispense pressure does not exceed 29 psig
  • Reliable dispense of low-viscosity fluid (1-100 cP) without sacrificing filtration performance
  • New user-friendly MMI software simplifies recipe programming and provides real-time status 
  • Real time robust confirmation tools help minimize costly wafer defects

IntelliGen® ULV Dispense Systems

Leading-edge, two-stage system with built in dual PT sensors not only enables independent dispense and filtration, but also achieves defect reduction of low-viscosity fluids. 

  • Low -viscosity fluid dispense with 1 – 100 cP or at higher viscosity when dispense pressure does not exceed 29 psig 
  • Reliable dispense of low-viscosity fluid (1-100 cP) without sacrificing filtration performance
  • New user-friendly MMI software simplifies recipe programming and provides real-time status
  • Real time robust confirmation tools help minimize costly wafer defects
  • Optimized fluid flow path provides better chemical turnover and reduced dead volume
  • Improved dispense feature prevents motor backlash enabling more consistent dispense
  • Optional post-cleaning procedure is available to help achieve faster start-up of wafer run

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