Best-in-class, bulk slurry filter with ultra-high particle loading capacity for bulk processes in sub-45 nm technology nodes. Enables superior hard particle removal and gel retention performance to prevent micro scratches.
Entegris Planargard® NMB Bulk CMP Filters
Bulk CMP slurry filter for 65 nm or greater technology nodes to prevent micro-scratches
Planargard® CL Bulk and Point-of-Use Cartridge Filter
Point-of-dispense CMP slurry filter to prevent micro-scratches