Entegris CMP Filtration Solutions

High Purity/CMP Components/Entegris CMP Filtration Solutions

Best-in-class, bulk slurry filter with ultra-high particle loading capacity for bulk processes in sub 45 nm technology nodes. Enables superior hard particle removal and gel retention performance to prevent micro scratches.

Overview of Products

  • Planargard® NMB Bulk CMP Filters
  • Planargard® CL Bulk and Point-of-Use Cartridge Filters
  • Planarcap® TPX Disposable Filters

Planargard® CL Filter

Bulk CMP slurry filter for 65 nm or greater technology nodes to prevent micro-scratches

Planarcap® TPX Filter

Point-of-dispense CMP slurry filter to prevent micro-scratches

Quick Contact


    Have a question or can't find what you're looking for?

    Please reach out to our experts to learn about the complete list of products we offer.


    Learn more about the manufacturers that we carry.

    We carry a variety of products from the best manufacturers in the industry.

    Learn about our locations

    Not all products are offered in each location. Please contact a SemiTorr representative to understand the products offered in each SemiTorr territory.

    Have a question?

    Talk to our team at one of our locations across the country.