Entegris CMP Filtration Solutions

High Purity/CMP Components/Entegris CMP Filtration Solutions

Best-in-class, bulk slurry filter with ultra-high particle loading capacity for bulk processes in sub 45 nm technology nodes. Enables superior hard particle removal and gel retention performance to prevent micro scratches.

Overview of Products

  • Planargard® NMB Bulk CMP Filters
  • Planargard® CL Bulk and Point-of-Use Cartridge Filters
  • Planarcap® TPX Disposable Filters

Planargard® CL Filter

Bulk CMP slurry filter for 65 nm or greater technology nodes to prevent micro-scratches

Planarcap® TPX Filter

Point-of-dispense CMP slurry filter to prevent micro-scratches

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