Entegris Concentration Monitors

High Purity/Pressure, Flow & Instrumentation/Entegris Concentration Monitors

Overview of Products

  • InVue® Concentration Monitors
  • InVue® Dissolved Oxygen Sensors
  • InVue® Refractometers

InVue® NX148 Concentration Monitors

Without process intrusion or interruption, the InVue® NX148 Concentration Monitor offers single-channel measurement of real-time information for in-line chemical mixing, blending, spiking and dilution.

  • Via Index of Refraction (IoR), this cost-effective and high-performance concentration monitor enables greater process efficiency for monitoring BEOL, FEOL and sub fab chemical blending and delivery systems
  • Watch this video to learn how IoR can improve your process monitoring
  • Included 148-connect user software enables on-site calibration in minutes, reducing cost of ownership
  • The unit’s small footprint can be easily installed directly in line with the process chemicals

InVue® CR288 Concentration Monitors

Without process intrusion or interruption, the InVue® CR288 Concentration Monitor offers four in-line measurement points of real-time information for in-line chemical mixing, blending, spiking and dilution.

  • Via Index of Refraction (IoR), this cost-effective and high-performance concentration monitor enables greater process efficiency for monitoring BEOL, FEOL and sub fab chemical blending and delivery systems
  • Watch this video to learn how IoR can improve your process monitoring 
  • Included 288-connect user software enables on-site calibration in minutes, reducing cost of ownership
  • The unit’s small footprint can be easily installed directly in line with the process chemicals

InVue® Dissolved Oxygen Sensors

Advanced, optically based monitoring solution for detecting and monitoring low levels of dissolved oxygen in chemical plating applications. InVue® Dissolve Oxygen Sensor (DOX) provides continuous measurement of dissolved oxygen levels with minimal intrusion.

  • High sensitivity, dissolved oxygen luminophore (field replaceable)
  • Corrosion-resistant, high purity design utilizes a clean, silicone wetted membrane in a PTFE enclosure
  • Two analog outputs: concentration and temperature

InVue® BT128 Refractometers

The InVue® BT128 refractometer is an optically-based, refractive index (RI) metrology solution that provides exacting and immediate results for single-sample concentration measurements of solutions in a benchtop setting. The refractometer (and the included software) enable user-friendly, real-time information and can also be utilized to determine process fluid calibration for use with our in-line monitoring devices.

  • Windows®-based interface provides RI and temperature outputs
  • Sample reservoir design enables easy cleaning between samples
  • Complies with FDA 21 CFR part 11
  • Factory-calibrated at 20°C (68°F)
  • Software provides layered user interface

 

Product Downloads

InVue BT128 Refractometer

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