OVERVIEW OF PRODUCTS
- InVue® Concentration Monitors
- InVue® Dissolved Oxygen Sensors
- InVue® Refractometers
InVue® NX148 Concentration Monitors
Without process intrusion or interruption, the InVue® NX148 Concentration Monitor offers single-channel measurement of real-time information for in-line chemical mixing, blending, spiking, and dilution.
- Via Index of Refraction (IoR), this cost-effective and high-performance concentration monitor enables greater process efficiency for monitoring BEOL, FEOL, and sub-fab chemical blending and delivery systems
- Watch this video to learn how IoR can improve your process monitoring
- Included 148-connect user software enables on-site calibration in minutes, reducing the cost of ownership
- The unit’s small footprint can be easily installed directly in line with the process chemicals
Product Downloads
InVue NX148 Concentration Monitor
InVue® CR288 Concentration Monitors
Without process intrusion or interruption, the InVue® CR288 Concentration Monitor offers four in-line measurement points of real-time information for in-line chemical mixing, blending, spiking, and dilution.
- Via Index of Refraction (IoR), this cost-effective and high-performance concentration monitor enables greater process efficiency for monitoring BEOL, FEOL, and sub-fab chemical blending and delivery systems
- Watch this video to learn how IoR can improve your process monitoring
- Included 288-connect user software enables on-site calibration in minutes, reducing the cost of ownership
- The unit’s small footprint can be easily installed directly in line with the process chemicals
Product Downloads
InVue CR288 Concentration Monitor
InVue CR288 Application Note for BEOL Semiconductor Processing
InVue® Dissolved Oxygen Sensors
Advanced, optically based monitoring solution for detecting and monitoring low levels of dissolved oxygen in chemical plating applications. InVue® Dissolve Oxygen Sensor (DOX) provides continuous measurement of dissolved oxygen levels with minimal intrusion.
- High sensitivity, dissolved oxygen luminophore (field replaceable)
- The corrosion-resistant, high-purity design utilizes a clean, silicone-wetted membrane in a PTFE enclosure
- Two analog outputs: concentration and temperature
Product Downloads
InVue® BT128 Refractometers
The InVue® BT128 refractometer is an optically-based, refractive index (RI) metrology solution that provides exacting and immediate results for single-sample concentration measurements of solutions in a benchtop setting. The refractometer (and the included software) enables user-friendly, real-time information and can also be utilized to determine process fluid calibration for use with our in-line monitoring devices.
- Windows®-based interface provides RI and temperature outputs
- Sample reservoir design enables easy cleaning between samples
- Complies with FDA 21 CFR part 11
- Factory-calibrated at 20°C (68°F)
- The software provides a layered user interface
