Entegris

Overview of Products

  • FluoroLine® Ultrapure PFA Tubing
  • FluoroLine® Industrial Grade PFA Tubing
  • FluoroLine® Dual Containment Tubing
  • FluoroLine® Plus Dual Containment Tubing
  • FluoroLine® Electrostatic Dissipative (ESD) Tubing
  • FluoroLine® ESD Tubing Grounding Straps
  • FluoroLine® PFA Convoluted Tubing
  • Flaretek® Flare Tools
  • Tube Cutters

FluoroLine® Ultrapure PFA Tubing

We offer ultrapure PFA tubing for use in highly corrosive environments and where resistance to certain specialized developers containing surfactants is required.

  • Compliant to SEMI Standard F57-0314, the specification for polymer components used in ultrapure water and liquid chemical distribution systems
  • Made from high purity PFA material to provide the lowest extractable ionic and organic levels
  • An optional ultraclean (UC) extrusion process yields tubing with the lowest total metal extractables and least amount of surface contamination
  • Permanently laser marked to allow 100% lot traceability to a specific material lot, production date and production inspection record; custom laser marking is available

FluoroLine® Industrial Grade PFA Tubing

FluoroLine® industrial grade PFA tubing is made from a special blend of high purity PFA. This material is excellent in harsh chemical applications where ultra high purity is not required.

  • Permanent serialized laser marketing is a nondestructive and non-contaminating method to identify tube material and OD. It also allows for 100% traceability to a specific material, product date, and production inspection record. 
  • Tight and consistent tolerances, along with lot-to-lot consistency are maintained using continuous on-line measurements of the OD and wall thickness

FluoroLine® Dual Containment Tubing

Quick and easy to install, FluoroLine® dual containment tubing enables uninterrupted process lines and increased safety at a lower cost per installed foot of tubing.

  • PFA primary containment provides universal chemical compatibility
  • FEP secondary containment enables easy visual inspection of primary tubing
  • Tube-in-tube design does not introduce contaminants during installation process, and enables long, continuous lengths without connections or welding
  • No special and expensive welding or heat bending processes are required
  • Laser marking on both inner and outer tubing enables traceability to the work order and inspection record

Product Downloads

FluoroLine® Plus Dual Containment Tubing

PFA primary containment and a special blend PFA secondary containment combine to provide safe, reliable double contained tubing that can be installed or retrofitted in mere hours instead of days.

  • PFA primary containment provides universal chemical compatibility
  • Special blend PFA secondary containment offers improved chemical resistance at a lower cost, and enables easy visual inspection of primary tubing
  • Tube-in-tube design does not introduce contaminants during installation process, and enables long, continuous lengths without connections or welding
  • No special and expensive welding or heat bending processes are required
  • Laser marking on both inner and outer tubing enables traceability to the work order and inspection record

FluoroLine® Electrostatic Dissipative (ESD) Tubing

An ideal solution for minimizing potential issues related to electrostatic discharge in the fab, maintaining chemical purity, ensuring safety and improving process yields. 

  • Extruded stripe on outside of ESD tubing provides a grounding for electrostatic charge buildup in tubing 
  • The PFA wetted material is 100% virgin grade and provides the lowest extractable ionic and organic levels
  • High-purity tubing comes in various standard sizes from 1/8” to 2”

FluoroLine® ESD Tubing Grounding Straps

Increase safety with our grounding straps that allow ESD charge to safely travel from the outside of the ESD tube, through the strap, to ground.

  • Made from carbon-loaded polypropylene, which allows the ESD charge to safely travel to ground
  • Manufactured with a series of holes that can be used to ground the ESD charge or to connect additional ground straps
  • Available for use with FluoroLine® ESD tubing sizes 1/8″ to 2″ 
  • Optional carbon-loaded polypropylene grounding strap connectors enable users to easily connect multiple grounding straps (up to 5) with one screw

FluoroLine® PFA Convoluted Tubing

Convoluted PFA tubing provides flexibility where straight wall and corrugated tubing is not suitable. 

  • Manufactured from PFA material, providing high purity and corrosion resistance
  • The 0.062″ wall thickness assures durability in the most aggressive fluid handling systems
  • Available in standard and custom lengths in 1/2″, 3/4″ and 1″ OD tube sizes; millimeter sizes may also be available upon request
  • Custom assemblies are also available

Flaretek® Flare Tools

Flaring mandrels, grip pads and universal tool kits are available to assist you in making a consistent, repeatable flare every time. Proper tube flaring and Flaretek® fitting assembly result in a secure tubing connection.

  • Individual mandrels are available for flaring 1/4″ to 1 1/4″ tube
  • A grip pad is available to help you get a firm grip on small diameter tubing
  • A universal tool kit is available that includes flaring mandrels for 1/4″, 3/8″, 1/2″ and 3/4″ tube

Tube Cutters

 

We offer various durable tube cutters for cutting our PFA tubing. Whether you need a crisp square cut or are working with very small diameter tubing, we have a reliable tube cutter for your application.

  • Handheld tube cutters are easy to use and provide a clean, straight cut 
  • Designed to cut FluoroLine Electrostatic Dissipative (ESD), Ultrapure and Industrial Grade PFA tubing, Cynergy® beadless weld tubing, as well as Low Permeation and EP PFA tubing
  • Replacement blades are available for tube cutters 213-16 and 213-30-1

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