ESC & Pedestal Refurbishment
Have a question about a specific part or need help on a project?
ICS – Integrated Circuit Support
ICS distributes high technology front-end wafer processing equipment replacement parts. These products include major components for line maintenance used in the fabrication of microelectronic devices.
Plansee Electro-Graph
From the smallest spare part through to the complete ion source. For all wafer diameters and production technologies: With more than 2000 components for implanter systems, we are the world’s largest second-source supplier for ion implantation.
Core Systems
Core Systems is a world leader in semiconductor ion implant outsourcing technology and production implant services. Core Systems product offering also includes; Disk Refurbishment, PVD Silicon Coating and Krytek Ion Source Conditioners to a world-wide market.